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Introduction to VLSI process engineering / edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka] - English language ed. - xiii, 210 páginas : ilustraciones ;

"The English language edition has been translated from the original Japanese publication ... "--Reverso de portada

Includes bibliographical references (p. [201]-204) and index.

ISBN: 0412395509 (papel alcalino)

Subjects--Topical Terms:
Circuitos integrados en muy gran escala--Diseño y construcción
Procesos de manufactura

LC Class. No.: TK7874 / I76 1993

Dewey Class. No.: 621.39/5