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Rai-Choudhury, P.,

MEMS and MOEMS technology and applications / Recent advances in MEMS and MOEMS technology P. Rai-Choudhury, editor - 520 páginas - SPIE Press monograph ; v. PM85 .

ISBN: 0819437166

Subjects--Topical Terms:
Sistemas microelectromecánicos
Dispositivos optoelectrónicos

LC Class. No.: TK7875 / R35

Dewey Class. No.: 621.381