Nano- and microelectromechanical system fundamentals of nano- and microengineering
Lyshevski, Sergey Edward,
Nano- and microelectromechanical system : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 338 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series .
0-8493-0916-6 (papel alcalino)
Sistemas microelectromecánicos
TK7875 / L97
Nano- and microelectromechanical system : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 338 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series .
0-8493-0916-6 (papel alcalino)
Sistemas microelectromecánicos
TK7875 / L97