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Materials science in microelectronics / E.S. Machlin - 2nd ed. - volúmenes

Contenido: v.1. The relationship between thin film proceessing and structure -- v.2. The effects of structure on properties in thin films

Subjects--Topical Terms:
Películas delgadas--Aplicaciones industriales
Microelectrónica
Dispositivos optoelectrónicos--Materiales

LC Class. No.: TK7871.15F5 / M37 2005