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Materials & process integration for MEMS / Materials and process integration for MEMS edited by Francis E.H. Tay - xix, 299 páginas : ilustraciones - Microsystems ; v. 9 .

ISBN: 1402071752 (papel alcalino)

Subjects--Topical Terms:
Sistemas microelectromecánicos

LC Class. No.: TK7875 / M36

Dewey Class. No.: 621.381