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Makabe, Toshiaki,

Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petroviâc - 339 páginas : ilustraciones - Series in plasma physics .

ISBN: 0750309768 9780750309769

Subjects--Topical Terms:
Ingeniería del plasma

LC Class. No.: TA2020 / M35 2006

Dewey Class. No.: 621.044