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Liu, Ai-Qun,

Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu ; co-authors, Xuming Zhang ... [y otros.] - 483 páginas : ilustraciones - Optical science and engineering series ; 136 .

ISBN: 9781420045680

Subjects--Topical Terms:
Sistemas microelectromecánicos
Fotónica

LC Class. No.: TK7875 / L58

Dewey Class. No.: 621.381