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Madou, Marc J.

Fundamentals of microfabrication and nanotechnology / Marc J. Madou - 3rd ed. - 3 volúmenes : ilustraciones

Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology -- Manufacturing techniques for microfabrication and nanotechnology -- From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications v. 1. v. 2. v. 3.

ISBN: 9781420055115 (v. 1. : empastado, cubierta dura) 9781420055191 (v. 2. : empastado, cubierta dura) 9781420055160 (v. 3. : empastado, cubierta dura)

Subjects--Topical Terms:
Sistemas microelectromecánicos
Sistemas nanoelectromecánicos
Microfluídica
Física del estado sólido

LC Class. No.: TK7875 / M33 2012

Dewey Class. No.: 620/.5