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Marcus, Robert B.,

Transmission electron microscopy of silicon vlsi circuits and structures / R. b. marcus and t. t. sheng - 217 páginas

"a wiley-interscience publications"

ISBN: 0471092517

Subjects--Topical Terms:
Circuitos integrados
Microscopía electrónica
Microscopios electronicos de transmision

LC Class. No.: TK7874 / M353