Introduction to VLSI process engineering / 
edited by the Society of Chemical Engineers of Japan ; [editor in chief, Yuji Naka] 
 - English language ed. 
 - xiii, 210 páginas :  ilustraciones ; 
<br/><br/> "The English language edition has been translated from the original Japanese publication ... "--Reverso de portada 
<br/><br/>Includes bibliographical references (p. [201]-204) and index. 
<br/><br/><label>ISBN: </label>0412395509 (papel alcalino) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuitos integrados en muy gran escala--Diseño y construcción<br/>Procesos de manufactura
<br/><br/><label>LC Class. No.: </label>TK7874  / I76 1993 
<br/><br/><label>Dewey Class. No.: </label>621.39/5