Rai-Choudhury, P., <br/><br/>
MEMS and MOEMS technology and applications / 
 Recent advances in MEMS and MOEMS technology 
P. Rai-Choudhury, editor 
 - 520 páginas 
 - SPIE Press monograph ;  v. PM85 .
<br/><br/><label>ISBN: </label>0819437166 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos<br/>Dispositivos optoelectrónicos
<br/><br/><label>LC Class. No.: </label>TK7875  / R35 
<br/><br/><label>Dewey Class. No.: </label>621.381