Lyshevski, Sergey Edward, Nano- and microelectromechanical system : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 338 páginas : ilustraciones - Nano- and microscience, engineering, technology, and medicine series . ISBN: 0-8493-0916-6 (papel alcalino) Subjects--Topical Terms: Sistemas microelectromecánicos LC Class. No.: TK7875 / L97