Campbell, Stephen A.,  1954-, <br/><br/>
The science and engineering of microelectronic fabrication / 
Stephen A. Campbell 
 - 2nd ed. 
 - xiv, 603 páginas :  ilustraciones 
 - The Oxford series in electrical and computer engineering .
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductores--Diseño y construcción
<br/><br/><label>LC Class. No.: </label>TK7871.85  / C34 2001