TY - BOOK AU - Zetterling,Carl-Mikael TI - Process technology for silicon carbide devices T2 - EMIS processing series SN - 0852969988 AV - TP261.C3 P76 PY - 2002/// CY - London, United Kingdom PB - Institution of Electrical Engineers, INSPEC KW - Carburo de silicio KW - Propiedades eléctricas ER -