Lyshevski, Sergey Edward, <br/><br/>
Nano- and microelectromechanical system :  fundamentals of nano- and microengineering / 
Sergey Edward Lyshevski 
 - 2nd ed. 
 - 722 páginas :  ilustraciones 
 - Nano- and microscience, engineering, technology, and medicine series .
<br/><br/><label>ISBN: </label>0-8493-2838-1 (papel alcalino) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos
<br/><br/><label>LC Class. No.: </label>TK7875  / L97 2005