Materials science in microelectronics / 
E.S. Machlin 
 - 2nd ed. 
 - volúmenes 
<br/><br/>Contenido: v.1. The relationship between thin film proceessing and structure -- v.2. The effects of structure on properties in thin films 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Películas delgadas--Aplicaciones industriales<br/>Microelectrónica<br/>Dispositivos optoelectrónicos--Materiales
<br/><br/><label>LC Class. No.: </label>TK7871.15F5  / M37 2005