Materials & process integration for MEMS / 
 Materials and process integration for MEMS 
edited by Francis E.H. Tay 
 - xix, 299 páginas :  ilustraciones 
 - Microsystems ;  v. 9 .
<br/><br/><label>ISBN: </label>1402071752 (papel alcalino) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos
<br/><br/><label>LC Class. No.: </label>TK7875  / M36 
<br/><br/><label>Dewey Class. No.: </label>621.381