TY  - BOOK
AU  - Tay,Francis E.H.
TI  - Materials & process integration for MEMS
T2  - Microsystems
SN  - 1402071752 (papel alcalino)
AV  - TK7875 M36
U1  - 621.381 21
PY  - 2002///
CY  - Boston
PB  - Kluwer Academic
KW  - Sistemas microelectromecánicos
ER  -