TY  - BOOK
AU  - Banks,Danny
TI  - Microengineering, MEMS, and interfacing: a practical guide 
T2  - Mechanical engineering
SN  - 0824723058 (papel alcalino)
AV  - TK7875 B35
U1  - 621 22
PY  - 2006///
CY  - Boca Raton, Florida
PB  - CRC Press/Taylor & Francis
KW  - Sistemas microelectromecánicos
ER  -