Makabe, Toshiaki, <br/><br/>
Plasma electronics :  applications in microelectronic device fabrication / 
T. Makabe, Z. Petroviāc 
 - 339 pįginas :  ilustraciones 
 - Series in plasma physics .
<br/><br/><label>ISBN: </label>0750309768 9780750309769 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ingenierķa del plasma
<br/><br/><label>LC Class. No.: </label>TA2020  / M35 2006 
<br/><br/><label>Dewey Class. No.: </label>621.044