TY  - BOOK
AU  - Liu,Aiqun
ED  - International Conference on Materials for Advanced Technologies
TI  - MEMS technology and devices: Suntec, Singapore, 1-6 July 2007 
SN  - 9789812709608 (encuadernado)
AV  - TK7875 I57
U1  - 621 22
PY  - 2007///
CY  - Singapore
PB  - Pan Stanford
KW  - Sistemas microelectromecánicos
KW  - Congresos
KW  - Materiales nanoestructurados
ER  -