TY  - BOOK
AU  - Yoo,Chue San
TI  - Semiconductor manufacturing technology
T2  - Advanced series in electrical and computer engineering
SN  - 9789812568236
AV  - TK7871.85 Y66 2008
U1  - 621.38152 22
PY  - 2008///
CY  - Hackensack, New Jersey
PB  - World Scientific
KW  - Semiconductores
KW  - Diseño y construcción
KW  - Industria de semiconductores
ER  -