TY  - BOOK
AU  - Liu,Ai-Qun
AU  - Zhang,Xuming
TI  - Photonic MEMS devices: design, fabrication and control 
T2  - Optical science and engineering series
SN  - 9781420045680
AV  - TK7875 L58
U1  - 621.381 22
PY  - 2009///
CY  - Boca Raton, Florida
PB  - CRC Press
KW  - Sistemas microelectromecánicos
KW  - Fotónica
ER  -