Madou, Marc J. <br/><br/>
Fundamentals of microfabrication and nanotechnology / 
Marc J. Madou 
 - 3rd ed. 
 - 3 volúmenes :  ilustraciones 
<br/><br/> Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --  Manufacturing techniques for microfabrication and nanotechnology --  From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications  v. 1.  v. 2.  v. 3. 
<br/><br/><label>ISBN: </label>9781420055115 (v. 1. : empastado, cubierta dura) 9781420055191 (v. 2. : empastado, cubierta dura) 9781420055160 (v. 3. : empastado, cubierta dura) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Sistemas microelectromecánicos<br/>Sistemas nanoelectromecánicos<br/>Microfluídica<br/>Física del estado sólido
<br/><br/><label>LC Class. No.: </label>TK7875  / M33 2012 
<br/><br/><label>Dewey Class. No.: </label>620/.5