TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 9781420055115 (v. 1. : empastado, cubierta dura)
AV  - TK7875 M33 2012
U1  - 620/.5 23
PY  - 2012///
CY  - Boca Raton, Florida
PB  - Taylor & Francis
KW  - Sistemas microelectromecánicos
KW  - Sistemas nanoelectromecánicos
KW  - Microfluídica
KW  - Física del estado sólido
N1  - v. 1; Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology --; v. 2; Manufacturing techniques for microfabrication and nanotechnology --; v. 3; From MEMS to Bio-MEMS and Bio-NEMS Manufacturing Techniques and Applications
ER  -