Marcus, Robert B., <br/><br/>
Transmission electron microscopy of silicon vlsi circuits and structures / 
R. b. marcus and t. t. sheng 
 - 217 páginas 
<br/><br/> "a wiley-interscience publications" 
<br/><br/><label>ISBN: </label>0471092517 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuitos integrados<br/>Microscopía electrónica<br/>Microscopios electronicos de transmision
<br/><br/><label>LC Class. No.: </label>TK7874  / M353