TY  - BOOK
AU  - Marcus, Robert B.,
AU  - Sheng, Tan-tsu
TI  - Transmission electron microscopy of silicon vlsi circuits and structures
SN  - 0471092517
AV  - TK7874 M353
PY  - 1983///
CY  - New York
PB  - J. Wiley
KW  - Circuitos integrados
KW  - Microscopía electrónica
KW  - Microscopios electronicos de transmision
N1  - "a wiley-interscience publications"
ER  -