| 000 | 00882nam a2200277zi 4500 | ||
|---|---|---|---|
| 005 | 20220221131457.0 | ||
| 008 | 011121c 2000wau b 001 0 eng | ||
| 020 | _a0819437166 | ||
| 035 | _aMX001000902055 | ||
| 040 |
_aDLC _cDLC |
||
| 041 | _aENG | ||
| 050 | 0 |
_aTK7875 _bR35 |
|
| 082 | 0 | 0 |
_a621.381 _221 |
| 100 | 2 |
_aRai-Choudhury, P., _eautor |
|
| 245 | 1 | 0 |
_aMEMS and MOEMS technology and applications / _cP. Rai-Choudhury, editor |
| 246 | 3 | 0 | _aRecent advances in MEMS and MOEMS technology |
| 264 | 1 |
_aBellingham, Washington : _bSPIE Optical Engineering, _cc2000 |
|
| 300 | _a520 páginas | ||
| 490 | 0 |
_aSPIE Press monograph ; _vv. PM85 |
|
| 650 | 0 | _aSistemas microelectromecánicos | |
| 650 | 0 | _aDispositivos optoelectrónicos | |
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
||
| 999 |
_c13409 _d13409 |
||