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| 008 | 021105s2001 nyua b 001 0 eng | ||
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_aContamination-free manufacturing for semiconductors and other precision products / _cedited by Robert P. Donovan |
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_aNew York : _bM. Dekker, _c2001 |
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| 300 |
_ax, 448 páginas : _bilustraciones ; |
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_aSemiconductores _xDiseño y construcción |
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_aSemiconductores _xDefectos |
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_aDonovan, Robert P., _eeditor |
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| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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