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_aMicrofabrication and nanomanufacturing / _c[edited by] Mark J. Jackson |
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_aBoca Raton, Florida : _bTaylor & Francis, _c2005 |
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_a401 páginas : _bilustraciones |
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| 650 | 0 | _aMicroelectrónica | |
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_aCircuitos integrados _xDiseño y construcción |
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_aSistemas microelectromecánicos _xDiseño y construcción |
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_aJackson, Mark J., _eeditor |
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_atexto _2rdacontent |
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_asin medio _2rdamedia |
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