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| 008 | 060505s2005 enka 000 0 eng d | ||
| 020 | _a1855739313 (Woodhead) | ||
| 020 | _a0-8493-3447-0 (CRC) | ||
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_aNanolithography and patterning techniques in microelectronics / _cedited by David G. Bucknall |
| 264 | 1 |
_aCambridge, England : _bWoodhead Publishing ; _aBoca Raton : _bCRC Press, _cc2005 |
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| 300 |
_a409 páginas : _bilustraciones |
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| 490 | 0 | _aWoodhead publishing in materials | |
| 650 | 4 | _aMicroelectrónica | |
| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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_avolumen _2rdacarrier |
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