| 000 | 00907nam a2200253zi 4500 | ||
|---|---|---|---|
| 005 | 20220221131602.0 | ||
| 008 | 060209m20059999ne 000 0 spa d | ||
| 035 | _aMX001001056161 | ||
| 040 |
_aUNAMX _bspa _cUNAMX |
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| 050 | 4 |
_aTK7871.15F5 _bM37 2005 |
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| 245 | 0 | 0 |
_aMaterials science in microelectronics / _cE.S. Machlin |
| 250 | _a2nd ed. | ||
| 264 | 1 |
_aAmsterdam : _bElsevier, _c2005- |
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| 300 | _avolúmenes | ||
| 505 | 0 | _aContenido: v.1. The relationship between thin film proceessing and structure -- v.2. The effects of structure on properties in thin films | |
| 650 | 4 |
_aPelículas delgadas _xAplicaciones industriales |
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| 650 | 4 | _aMicroelectrónica | |
| 650 | 4 |
_aDispositivos optoelectrónicos _xMateriales |
|
| 700 | 1 |
_aMachlin, E. S., _eeditor |
|
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c17189 _d17189 |
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