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_aMaterials & process integration for MEMS / _cedited by Francis E.H. Tay |
| 246 | 3 | 0 | _aMaterials and process integration for MEMS |
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_aBoston : _bKluwer Academic, _cc2002 |
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_axix, 299 páginas : _bilustraciones |
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_aMicrosystems ; _vv. 9 |
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| 650 | 0 | _aSistemas microelectromecánicos | |
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_aTay, Francis E. H., _eeditor |
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_atexto _2rdacontent |
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_asin medio _2rdamedia |
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