000 00817nam a2200241zi 4500
005 20220221131613.0
008 061031s2006 xxua b 001 0 eng
020 _a0824723058 (papel alcalino)
035 _aMX001001082157
040 _aDLC
_bspa
_cDLC
_dYDX
_dBAKER
_dOCLCQ
_dDLC
_dUNAMX
050 0 _aTK7875
_bB35
082 0 0 _a621
_222
100 1 _aBanks, Danny,
_eautor
245 1 0 _aMicroengineering, MEMS, and interfacing :
_ba practical guide /
_cDanny Banks
264 1 _aBoca Raton, Florida :
_bCRC Press/Taylor & Francis,
_c2006
300 _a326 páginas :
_bilustraciones
490 0 _aMechanical engineering ;
_v199
650 0 _aSistemas microelectromecánicos
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
999 _c17753
_d17753