| 000 | 00687nam a2200217zi 4500 | ||
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| 005 | 20220221131615.0 | ||
| 008 | 061208s2006 xxua 001 0 eng | ||
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_aTK7875 _bL39 |
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| 100 | 1 |
_aLiu, Chang, _eautor |
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| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 264 | 1 |
_aUpper Saddle River, New Jersey : _bPrentice Hall, _cc2006 |
|
| 300 |
_axxii, 530 páginas : _bilustraciones |
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| 650 | 0 | _aSistemas microelectromecánicos | |
| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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_avolumen _2rdacarrier |
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