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| 005 | 20220221131617.0 | ||
| 008 | 070130s2006 xxua 001 0 eng | ||
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_a621.044 _222 |
| 100 | 1 |
_aMakabe, Toshiaki, _eautor |
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| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cT. Makabe, Z. Petroviâc |
| 264 | 1 |
_aNew York : _bTaylor & Francis, _c2006 |
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| 300 |
_a339 páginas : _bilustraciones |
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| 490 | 0 | _aSeries in plasma physics | |
| 650 | 0 | _aIngeniería del plasma | |
| 700 | 1 |
_aPetroviâc, Z., _eautor |
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| 336 |
_atexto _2rdacontent |
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_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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