000 00851nam a2200241 a 4500
008 090105s2008^^^^xxua^^^^^^^^^^000^0^eng^d
020 _a9789812568236
020 _a9812568239
035 _aMX001001164571
040 _aUKM
_bspa
_cUKM
_dBTCTA
_dBAKER
_dYDXCP
_dDLC
_dUNAMX
050 4 _aTK7871.85
_bY66 2008
082 0 4 _a621.38152
_222
100 1 _aYoo, Chue San,
_eautor
245 1 0 _aSemiconductor manufacturing technology /
_cChue San Yoo
264 1 _aHackensack, New Jersey :
_bWorld Scientific,
_c2008
300 _axii, 470 páginas :
_bilustraciones
336 _atexto
_2rdacontent
337 _asin medio
_2rdamedia
338 _avolumen
_2rdacarrier
490 0 _aAdvanced series in electrical and computer engineering ;
_v13
650 4 _aSemiconductores
_xDiseño y construcción
650 4 _aIndustria de semiconductores
999 _c19629
_d19629