000 | 00851nam a2200241 a 4500 | ||
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008 | 090105s2008^^^^xxua^^^^^^^^^^000^0^eng^d | ||
020 | _a9789812568236 | ||
020 | _a9812568239 | ||
035 | _aMX001001164571 | ||
040 |
_aUKM _bspa _cUKM _dBTCTA _dBAKER _dYDXCP _dDLC _dUNAMX |
||
050 | 4 |
_aTK7871.85 _bY66 2008 |
|
082 | 0 | 4 |
_a621.38152 _222 |
100 | 1 |
_aYoo, Chue San, _eautor |
|
245 | 1 | 0 |
_aSemiconductor manufacturing technology / _cChue San Yoo |
264 | 1 |
_aHackensack, New Jersey : _bWorld Scientific, _c2008 |
|
300 |
_axii, 470 páginas : _bilustraciones |
||
336 |
_atexto _2rdacontent |
||
337 |
_asin medio _2rdamedia |
||
338 |
_avolumen _2rdacarrier |
||
490 | 0 |
_aAdvanced series in electrical and computer engineering ; _v13 |
|
650 | 4 |
_aSemiconductores _xDiseño y construcción |
|
650 | 4 | _aIndustria de semiconductores | |
999 |
_c19629 _d19629 |