| 000 | 00843nam a2200241zi 4500 | ||
|---|---|---|---|
| 005 | 20220221131804.0 | ||
| 008 | 150629s2015 xxua 000 0 eng d | ||
| 020 | _a9781482222050 (encuadernado en tela : papel alcalino) | ||
| 035 | _aMX001001772506 | ||
| 040 |
_aUNAMX _bspa _erda _cUNAMX _dUNAMX |
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| 050 | 4 |
_aTA2020 _bM35 2015 |
|
| 100 | 1 |
_aMakabe, Toshiaki, _eautor |
|
| 245 | 1 | 0 |
_aPlasma electronics : _bapplications in microelectronic device fabrication / _cToshiaki Makabe, Zoran Lj. Petrovic |
| 250 | _aSecond edition | ||
| 264 | 1 |
_aBoca Raton : _bCRC Press, _c2015 |
|
| 300 |
_axxxv, 376 páginas : _bilustraciones |
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| 650 | 4 | _aIngeniería del plasma | |
| 700 | 1 |
_aPetrović, Z., _eautor |
|
| 336 |
_atexto _2rdacontent |
||
| 337 |
_asin medio _2rdamedia |
||
| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c24147 _d24147 |
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