000 | 00778nam a2200241 a 4500 | ||
---|---|---|---|
008 | 150911s2010^^^^enka^^^^^^^^^^000^0^eng^d | ||
020 | _a0470749830 | ||
020 | _a9780470749838 | ||
035 | _aMX001001781325 | ||
040 |
_aUNAMX _bspa _erda _cUNAMX |
||
050 | 4 |
_aTK7875 _bF73 2010 |
|
100 | 1 |
_aFranssila, Sami, _eautor |
|
245 | 1 | 0 |
_aIntroduction to microfabrication / _cSami Franssila |
250 | _a2nd. edition | ||
264 | 1 |
_aChichester, West Sussex : _bJ. Wiley & Sons, _c2010 |
|
300 |
_axiv, 518 páginas : _bilustraciones |
||
336 |
_atexto _2rdacontent |
||
337 |
_asin medio _2rdamedia |
||
338 |
_avolumen _2rdacarrier |
||
650 | 4 | _aSistemas microelectromecánicos | |
650 | 4 | _aAparatos e instrumentos electrónicos | |
650 | 4 | _aMicrofabricación | |
999 |
_c24251 _d24251 |